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        Products

        Fujian Deer Technology Company Ltd. 

        Address: JiaoYang Industrial Zone,ShangHang County,LongYan,Fujian,China

        Tel: +86 0597-5331188(Office Tel)

        +86 0597-5331166/5331363 (Domestic Tel) 

         +86 0597-5332618( International Tel) 

        Fax:0597-5335599
        E-mail:  info@fjdeertech.com

        Site:www.brugmanbonaire.com




        Products

        Tetrafluoromethane
        (electronic grade)

        instructions

        Tetrafluoromethane is a colorless, odorless, non-flammable, inert, compressed gas. It is the largest amount plasma etching gas in the microelectronics industry, can be widely applied to etch Silicon, Silicon dioxide, Silicon nitride, Phospho-silicate glass and Tungsten film materials. It is also used in the surface cleaning, solar cells, laser technology, gas-phase insulation, subzero refrigeration, leakage inspection agents, attitude control of cosmic rockets, and detergents in the printed circuits.


        Electronic Grade CF4 Specification


        Parameter

        Critical Assay

        Unit

        Deer Specification

        Tetrafluoromethane (CF4)

        %

        ≥ 99.9995

        Oxygen (O2)

        ppm v

        ≤ 0.5

        Nitrogen(N2)

        ppm v

        ≤ 2.0

        Carbon Monoxide(CO)

        ppm v

        ≤0.3

        Carbon Dioxide(CO2)

        ppm v

        ≤0.5

        Sulfur Hexafluoride(SF6)

        ppm v

        ≤0.1

        Total Fluorocarbon(TFC

        ppm v

        ≤0.3

        Total   Hydrocarbon(as CH4)

        ppm v

        ≤0.3

        MoistureH2O

        ppm v

        ≤ 1.0

        Acidity ( HF )

        ppm v

        ≤0.1

        Total contents of impurity

        ppm v

            ≤ 10.0


        Packing: Various types optional.

        Fujian Deer Technology Company Ltd. 

        Tel:0597-5331188      Address: JiaoYang Industrial Zone,ShangHang County,LongYan,Fujian,China